Electronics & Computing Hardware

Vadim Banine

EUV lithography system

NetherlandsEvidence: high confidenceChecked July 2026

Vadim Banine co-invented key technology for extreme-ultraviolet lithography systems used to manufacture advanced microchips. His work on EUV research and source technology helped make smaller, more capable chips possible, and the European Inventor Award identifies his shared technical contribution.

01

What Vadim did

Co-invented key EUV lithography technology for manufacturing smaller microchips.

02

Why it matters

European Inventor Award recognition credits Banine and Erik Loopstra with EUV lithography for smaller, more powerful microchips.

03

Living-status check

A Justia patent record lists Banine as an inventor on an ASML lithographic-apparatus application filed 28 October 2025, a direct recent legal filing rather than a grant or publication date.